Back to results
US 2022/0380511 A1Published application
Sequence-block copolymers and preparation therefor and application thereof
AssigneeCanton Litho Material Technology Inc.
InventorsHai DENG, Min CAO
Life of this patent
Estimating the term…
Abstract
Sequence-block copolymers have well-controlled and precise monomer sequence. A highly ordered fluoro-containing block copolymer material can be prepared based on the sequence-block copolymer, which shows excellent patterning capability.
Claims18
A sequence-block binary copolymer, wherein the main chain of the copolymer is consisting of sequence-block X, and the sequence-block X has a structure shown in formula (1):
- −[(AAA)m−(AB)n]p− (1)
- wherein,
- (AAA) is a homopolymeric segment of monomer A, which is formed by the homopolymerization of three monomers A;
- m is selected from the group consisting of 1, 2, 3, 4, 5, 6, 7, 8, 9, and 10;
- (AB) is a copolymerized segment of monomer A and monomer B, which is formed by copolymerization of one monomer A and one monomer B;
- n is selected from the group consisting of 1, 2, 3, 4, 5, 6, 7, 8, 9, and 10;
- p is selected from the group consisting of 1, 2, 3, 4, 5, 6, 7, 8, 9, and 10.
4 more elements
A sequence-block terpolymer, wherein the sequence-block terpolymer is formed by copolymerization of monomer A, monomer B and monomer C;
- the sequence-block terpolymer has a structure shown in formula (2):
- −[(AC)k−(AA)m−(AB)n]p− (2)
- wherein,
- (AC) is a copolymerized segment of monomer A and monomer C, which is formed by copolymerization of one monomer A and one monomer C;
- k is selected from the group consisting of 1, 2, 3, 4, 5, 6, 7, 8, 9, and 10;
- (AA) is a homopolymeric segment of monomer A, which is formed by the homopolymerization of two monomers A;
- m is selected from the group consisting of 1, 2, 3, 4, 5, 6, 7, 8, 9, and 10;
- (AB) is a copolymerized segment of monomer A and monomer B, which is formed by copolymerization of one monomer A and one monomer B;
- n is selected from the group consisting of 1, 2, 3, 4, 5, 6, 7, 8, 9, and 10;
- p is selected from the group consisting of 1, 2, 3, 4, 5, 6, 7, 8, 9, and 10.
7 more elements
Dependencies are inferred from the claim text.