Conditioning disk replacement apparatus and method
AssigneeSamsung Electronics Co., Ltd.
InventorsHOSEOP CHOI, MINSEOP PARK, JUBONG LEE, SUNG YONG PARK, KIJU SOHN, JAEYOUNG EOM
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Abstract
A conditioning disk replacement apparatus includes; a detacher configured to separate a conditioning disk from to a holder, a transfer part configured to transfer the conditioning disk, and a container configured to store the conditioning disk. The detacher includes a detachment body and a rotary part coupled to the detachment body, the rotary part includes a key protruding outward from the rotary part in a first horizontal direction, and the rotary part is configured to rotate about a central axis extending in the first horizontal direction.
Claims20
A conditioning disk replacement apparatus, comprising:
- a detacher configured to separate a conditioning disk from to a holder;
- a transfer part configured to transfer the conditioning disk;
- and
- a container configured to store the conditioning disk,
- wherein the detacher includes a detachment body and a rotary part coupled to the detachment body,
- the rotary part includes a key protruding outward from the rotary part in a first horizontal direction, and
- the rotary part is configured to rotate about an axis extending in the first horizontal direction.
A conditioning disk replacement method, comprising:
- inserting a key of a detacher into a groove between a holder and an old conditioning disk coupled to a lower surface of the holder;
- and
- rotating the key to press an upper surface of the key on a portion of the lower surface of the holder and press a lower surface of the key on a portion of an upper surface of the old conditioning disk to separate the old conditioning disk from the holder.
A conditioning disk replacement apparatus, comprising:
- a detacher configured to separate a conditioning disk from a holder of a chemical mechanical polishing apparatus,
- wherein the detacher includes a detachment body and a rotary part coupled to the detachment body,
- the rotary part includes a key protruding in a first horizontal direction from the detachment body and extending in a second horizontal direction, and
- the rotary body is configured to rotate about an axis extending in the first horizontal direction.
Dependencies are inferred from the claim text.