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US 2022/0379339 A1Published application
Coating apparatus and coating method
AssigneesKabushiki Kaisha Toshiba, Toshiba Energy Systems & Solutions Corporation
InventorsNaomi SHIDA, Katsuyuki NAITO, Yutaka SAITA
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Abstract
According to one embodiment, a coating apparatus includes a coating bar configured to face a member to be coated, and a plurality of nozzles configured to supply a liquid toward the coating bar. A number of the nozzles is 3 or more. An arithmetic mean roughness Ra of at least a part of a surface of the coating bar is not less than 0.5 μm and not more than 10 μm.
Claims20
A coating apparatus, comprising:
- a coating bar configured to face a member to be coated;
- and
- a plurality of nozzles configured to supply a liquid toward the coating bar,
- a number of the nozzles is 3 or more, and
- an arithmetic mean roughness Ra of at least a part of a surface of the coating bar is not less than 0.5 μm and not more than 10 μm.
2 more elements
Dependencies are inferred from the claim text.