Mirror device manufacturing method and mirror unit manufacturing method
AssigneeHamamatsu Photonics K.K.
InventorsDaiki SUZUKI, Tomoyuki IDE, Mikito TAKAHASHI
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Abstract
A mirror device manufacturing method includes a forming step of forming a structure by forming a base portion, a movable portion, and a coupling portion coupling the base portion and the movable portion to each other such that the movable portion is able to swing with respect to the base portion through processing of a wafer, and forming a mirror layer in the movable portion; and a collecting step of performing collection of foreign substances from the structure using a collection member after the forming step. A mirror unit manufacturing method includes a sealing step of sealing the mirror device after the collecting step.
Claims15
A mirror device manufacturing method comprising:
- a forming step of forming a structure by forming a base portion, a movable portion, and a coupling portion coupling the base portion and the movable portion to each other such that the movable portion is able to swing with respect to the base portion through processing of a wafer, and forming a mirror layer in the movable portion;
- and
- a collecting step of performing collection of foreign substances from the structure using a collection member after the forming step.
A mirror unit manufacturing method comprising:
- a preparing step of preparing a mirror device having a structure including a base portion, a movable portion, a coupling portion coupling the base portion and the movable portion to each other such that the movable portion is able to swing with respect to the base portion, and a mirror layer provided in the movable portion;
- a fixing step of fixing the mirror device to a mounting portion after the preparing step;
- and
- a collecting step of performing collection of foreign substances from the structure using a collection member after the fixing step.
Dependencies are inferred from the claim text.