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US 2022/0357604 A1Published application
Optical Modulator
AssigneeNippon Telegraph and Telephone Corporation
InventorsTatsuro Hiraki, Shinji Matsuo, Tai Tsuchizawa
Life of this patent
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Abstract
A core, constituted by an amorphous undoped semiconductor (i type), which is formed on a lower clad layer, and a p-type layer and an n-type layer which are disposed on the lower clad layer with the core interposed therebetween and are formed in contact with the core are provided. The core is formed to be thicker than the p-type layer and the n-type layer. The p-type layer and the n-type layer are constituted by single crystal silicon.
Claims12
1-7. (canceled)
An optical modulator comprising:
- a core, wherein the core is constituted by an amorphous semiconductor on a clad layer;
- and
- a p-type layer and an n-type layer on the clad layer with the core interposed therebetween, wherein the p-type layer and the n-type layer contact the core, and wherein the p-type layer and the n-type layer are constituted by single crystal silicon.
A method comprising:
- providing a core, wherein the core is constituted by an amorphous semiconductor on a clad layer;
- and
- forming a p-type layer and an n-type layer on the clad layer with the core interposed therebetween, wherein the p-type layer and the n-type layer contact the core, and wherein the p-type layer and the n-type layer are constituted by single crystal silicon.
Dependencies are inferred from the claim text.