Roller for transporting a flexible substrate, vacuum processing apparatus, and methods therefor
AssigneeApplied Materials, Inc.
InventorsAndreas SAUER, Annemarie HLADIK, Bernhard KÖHLER, Thomas DEPPISCH, Claire ARMSTRONG, Wolfgang BUSCHBECK
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Abstract
A roller for transporting a flexible substrate is described. The roller includes a main body having a plurality of gas supply slits provided in an outer surface of the main body. The plurality of gas supply slits extends in a direction of a central rotation axis of the roller. Further, the roller includes a sleeve provided circumferentially around and in contact with the main body. The sleeve has a plurality of gas outlets extending in a radial direction (R) and being provided above the plurality of gas supply slits.
Claims16
A roller for transporting a flexible substrate, comprising
- a main body having a plurality of gas supply slits provided in an outer surface of the main body, the plurality of gas supply slits extending in a direction of a central rotation axis of the roller;
- and
- a sleeve provided circumferentially around and in contact with the main body, the sleeve having a plurality of gas outlets extending in a radial direction (R) and being provided above the plurality of gas supply slits.
A method of manufacturing a roller for guiding a flexible substrate, comprising
- producing a sleeve having a plurality of gas outlets by using laser drilling;
- and
- providing the sleeve circumferentially around and in contact with a main body of the roller having a plurality of gas supply slits provided in an outer surface of the main body such that the plurality of gas outlets are arranged above the plurality of gas supply slits.
Dependencies are inferred from the claim text.