Roller for transporting a flexible substrate, vacuum processing apparatus, and methods therefor
AssigneeApplied Materials, Inc.
InventorsThomas DEPPISCH, Stefan BANGERT, Claire ARMSTRONG, Frank SCHNAPPENBERGER
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Abstract
A roller for transporting a flexible substrate is described. The roller includes a main body having a plurality of gas supply slits provided in an outer surface of the main body. The plurality of gas supply slits extends in a direction of a central rotation axis of the roller. Further, the roller includes a sleeve provided circumferentially around and in contact with the main body. The sleeve has a plurality of gas outlets being provided above the plurality of gas supply slits. Further, the sleeve includes a metal layer embedded within isolating material.
Claims18
A roller for transporting a flexible substrate, comprising:
- a main body having a plurality of gas supply slits provided in an outer surface of the main body, the plurality of gas supply slits extending in a direction of a central rotation axis of the roller;
- and
- a sleeve provided circumferentially around and in contact with the main body, the sleeve having a plurality of gas outlets being provided above the plurality of gas supply slits, the sleeve comprising a metal layer embedded within isolating material.
A roller for transporting a flexible substrate, comprising:
- a main body (101) having a plurality of gas supply slits provided in an outer surface of the main body, the plurality of gas supply slits extending in a direction of a central rotation axis of the roller;
- and
- a sleeve provided circumferentially around and in contact with the main body, the sleeve having a plurality of insets of isolating material with a plurality of gas outlets being provided above the plurality of gas supply slits.
A method of manufacturing a roller for guiding a flexible substrate, comprising:
- producing a sleeve having a plurality of gas outlets by using laser drilling, the sleeve comprising at least one of a metal layer embedded within isolating material and a plurality of insets of isolating material;
- and
- providing the sleeve circumferentially around and in contact with a main body of the roller having a plurality of gas supply slits provided in an outer surface of the main body such that the plurality of gas outlets is arranged above the plurality of gas supply slits.
Dependencies are inferred from the claim text.