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US 2022/0352689 A1Published application
Siloxane mitigation for laser systems
AssigneePanasonic Intellectual Property Management Co., Ltd.
InventorsBryan LOCHMAN, Wang-Long ZHOU, Francisco VILLARREAL-SAUCEDO, Bien CHANN
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Abstract
In various embodiments, the concentration and deposition of siloxane materials within components of laser systems, such as laser resonators, is reduced or minimized utilizing mitigation systems that may also supply gas having low siloxane levels into multiple different components in series or in parallel.
Claims28
-161. (canceled)
A laser apparatus comprising:
- a laser system comprising a plurality of enclosed components, at least one of the components comprising one or more beam emitters therewithin;
- a plurality of gas inlets, each gas inlet being configured to permit ingress of gas into a different component;
- an inlet manifold fluidly coupled to the plurality of gas inlets;
- a pump for supplying gas to the inlet manifold;
- and
- a siloxane-mitigation system configured to remove siloxanes from gas supplied to the inlet manifold by the pump.
3 more elements
Dependencies are inferred from the claim text.