Vessels and methods for storing and delivery a reagent
AssigneeEntegris, Inc.
InventorsOleg Byl, Douglas Edwards, Jessica Verbisky
Life of this patent
Estimating the term…
Abstract
A storage vessel to contain reagent material. The storage vessel includes a vessel with a bottom, a top, an outlet at the top, sidewalls extending from the bottom to the top, a valve at the outlet, and an interior defined by the bottom, the top, and the sidewalls, the interior including a volume, and an extension tube having a first end engaged with the valve and a second end located toward a center of the interior volume from the first end such that, regardless of orientation of the vessel, the second end is above at least 25 percent of a volume of the interior volume.
Claims10
A storage vessel to contain reagent material, comprising:
- a vessel comprising a bottom, a top, an outlet at the top, sidewalls extending from the bottom to the top, a valve at the outlet, and an interior defined by the bottom, the top, and the sidewalls, the interior comprising a volume, and
- an extension tube having a first end engaged with the valve and a second end located toward a center of the interior volume from the first end such that, regardless of orientation of the vessel, the second end is above at least 25 percent of a volume of the interior volume.
A method of adding reagent material to a storage vessel, the method comprising:
- to a storage vessel that comprises:
- a bottom, a top, an outlet at the top, sidewalls extending from the bottom to the top, and an interior defined by the bottom, the top, and the sidewalls,
- an extension tube having a first end engaged with the outlet and a second end that is located:
- axially from the sidewalls, and
- at a distance is in a range from 25 to 75 percent of the height of the vessel, and
- adding liquid reagent material to the interior to a level of the liquid that is below the second end of the extension tube with the vessel in any orientation, including:
- in an upright orientation;
- in a horizontal orientation, and in an upside-down orientation.
A storage vessel adapted to store reagent material in a liquid phase and a gas phase, the storage vessel comprising:
- a bottom, a top, an outlet at the top, sidewalls extending from the bottom to the top, an interior defined by the bottom, the top, and the sidewalls, and a valve at the outlet,
- an extension tube having a first end engaged with the valve and a second end that is located:
- axially from the sidewalls, and
- at a distance that is in a range from 25 to 75 percent of a height of the vessel.
Dependencies are inferred from the claim text.