Vacuum-tight electrical feedthrough

Abstract

Vacuum-tight electrical feedthrough 10, comprising an electrically insulating insulator element 2 having a through-opening 23, having a first boundary surface 21 adjacent to the through-opening, and having a second boundary surface 22 also adjacent to the through-opening and opposite to the first boundary surface, and an electrically conductive conductor element 1 which extends through the through-opening 23 and which is connected to the insulator element 2 in a vacuum-tight manner along a circumferential line of the conductor element 1, wherein the insulator element 2 is transmissive to electromagnetic radiation 25 in an optical wavelength range, and wherein the first boundary surface 21 and/or the second 22 boundary surface is formed as a curved surface, in particular as a convex or concave surface. The invention further relates to a vacuum pressure sensor having the vacuum-tight electrical feedthrough and a method for measuring a radiation intensity of electromagnetic radiation.

Dependencies are inferred from the claim text.