Substrate processing apparatus and manufacturing method thereof

A substrate processing facility comprising:

• a load port on which a carrier storing a substrate is mounted;
• a transport frame in which an index robot that conveys the substrate from the carrier mounted on the load port is provided;
• and
• a process processing module including a substrate processing apparatus that performs a liquid processing process on the substrate,
• wherein the substrate processing apparatus includes:
• a substrate support unit that includes a chuck for supporting the substrate,
• a fluid supply unit that supplies a processing fluid to the substrate, and
• a recovery unit surrounding the chuck and configured to recover the supplied processing fluid, and
• wherein the substrate support unit includes an antistatic material in which milled carbon fibers (MCF) are blended into a perfluoroalkoxy alkane (PFA) resin.

A manufacturing method of a substrate processing apparatus including a substrate support unit that includes a chuck for supporting a lower surface of a substrate and a chuck pin formed to come into contact with a side surface portion of the substrate, a fluid supply unit that supplies a processing fluid to the substrate, and a recovery unit that is disposed to surround the chuck and recovers the supplied processing fluid, the method comprising:

• producing the chuck by injection processing by blending milled carbon fibers (MCF) into a perfluoroalkoxy alkane (PFA) resin;
• providing the chuck pin with a conductive material having resistance lower than the substrate;
• and
• grounding the chuck.