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US 2022/0337222 A1Published application
Electromechanical resonators based on metal-chalcogenide nanotubes
AssigneesYeda Research and Development Co. Ltd., B.G. Negev Technologies and Applications Ltd., At Ben-Gurion University
InventorsReshef TENNE, Ernesto JOSELEVICH, Yiftach DIVON, Roi LEVI, Assaf YAAKOBOVITZ, Dan YUDILEVICH
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Abstract
This invention provides electromechanical resonators based on metal chalcogenide nanotubes. The invention further provides methods of fabrication of electromechanical resonators and methods of use of such electromechanical resonators.
Claims12
A method of fabrication of an electromechanical resonator, said method comprising:
- providing a substrate;
- applying at least a first pad and a second pad onto said substrate such that said pads are not in contact with each other;
- applying at least one metal-chalcogenide nanotube onto said pads such that a first region of said nanotube is in contact with said first pad and a second region of said nanotube is in contact with said second pad;
- and
- removing a substrate surface layer underneath said nanotube, thus suspending said nanotube over said substrate.
2 more elements
Dependencies are inferred from the claim text.