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US 2022/0334489 A1Published application
Hardmask composition, hardmask layer, and pattern forming method
AssigneeSamsung SDI Co., Ltd.
InventorJaebum LIM
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Abstract
The present invention relates to a hardmask composition including a compound represented by Chemical Formula 1 and a solvent, a hardmask layer including a cured product of the hardmask composition, and a pattern forming method using the hardmask composition. In Chemical Formula 1, the definitions of A, R1 to R5, and n are as described in the specification.
Claims17
A hardmask composition comprising a compound represented by Chemical Formula 1 and a solvent:
- wherein, in Chemical Formula 1,
- A is a C6 to C30 aromatic moiety,
- R1 to R5 are each independently hydrogen, a substituted or unsubstituted C6 to C30 aryl group, a substituted or unsubstituted C3 to C30 heteroaryl group, or a combination thereof or a group represented by Chemical Formula 2,
- at least one of R1 to R5 is a group represented by Chemical Formula 2, and
- n is an integer greater than or equal to 2,
- wherein, in Chemical Formula 2,
- X is a substituted or unsubstituted C6 to C30 arylene group,
- Y is a substituted C6 to C60 aryl group or a substituted or unsubstituted C3 to C60 heteroaryl group, wherein the substituted C6 to C60 aryl group includes a substituent selected from hydroxy group, amine group, mercapto group, a substituted or unsubstituted C1 to C30 alkoxy group, a substituted or unsubstituted C1 to C30 alkylthiol group, a substituted or unsubstituted C1 to C20 alkylamine group, a substituted or unsubstituted C3 to C30 heteroaryl group, or a combination thereof,
- m is 0 or 1, and
- indicates a linking point with Chemical Formula 1.
7 more elements
Dependencies are inferred from the claim text.