Method for the preparation of a lead-free piezoelectric material and precursor solution
AssigneeSTMicroelectronics S.r.l.
InventorsValeria CASUSCELLI, Rossana SCALDAFERRI, Paola Sabrina BARBATO
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AssigneeSTMicroelectronics S.r.l.
InventorsValeria CASUSCELLI, Rossana SCALDAFERRI, Paola Sabrina BARBATO
Estimating the term…
The present disclosure relates to a method for the preparation of a precursor solution for a ceramic of the BZT-aBXT type wherein X is selected from Ca, Sn, Mn and Nb and a is a molar fraction selected in the range between 0.10 and 0.90 comprising the steps of: a) dissolving at least one barium precursor compound and at least one precursor compound selected from the group consisting of a calcium precursor compound, a tin precursor compound, a manganese precursor compound and a niobium precursor compound in a linear or branched anhydrous alkyl alcohol containing from 2 to 6 carbon atoms and, after dissolution, dehydrating by stripping, to obtain a first solution; b) dissolving at least one zirconium precursor compound and at least one titanium precursor compound in a linear or branched anhydrous alkyl alcohol containing from 2 to 6 carbon atoms in the presence of an anhydrous chelating agent to obtain a second solution; c) joining said first and second solutions in an anhydrous environment and dehydrating by stripping to obtain said precursor solution. It also relates to a precursor solution, to a method for the preparation of a film of a piezoelectric material, to a piezoelectric material and to an electronic device comprising this piezoelectric material.
A method, comprising:
Dependencies are inferred from the claim text.