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US 2022/0332575 A1Published application
Portable fluorine generator for on-site calibration
AssigneeApplied Materials, Inc.
InventorJoseph A. VAN GOMPEL
Life of this patent
Estimating the term…
Abstract
A method and apparatus for generation of fluorine gas (F2) in situ at the point of use is provided. The portable fluorine generator includes a dilution system disposed within a housing and operable to mix a feed gas comprising fluorine with an inert gas. The portable fluorine generator further includes a plasma reactor unit disposed within the housing and operable to separate fluorine (F2) from the feed gas comprising fluorine.
Claims20
An apparatus for producing fluorine (F2) gas, comprising:
- a housing having an inlet operable to receive an inert gas;
- a source operable to supply a feed gas comprising fluorine;
- a dilution system disposed within the housing operable to mix the feed gas comprising fluorine with the inert gas;
- and
- a plasma reactor unit disposed within the housing operable to separate fluorine (F2) from the feed gas comprising fluorine, the plasma reactor unit having:
- a first inlet channel operable to receive the feed gas comprising fluorine;
- and
- an outlet channel operable to deliver the fluorine gas.
5 more elements
A system for producing fluorine (F2) gas, comprising:
- a portable cart for producing fluorine (F2) gas, comprising:
- a housing;
- a source operable to supply a feed gas comprising fluorine positioned within the housing;
- a dilution system disposed within the housing operable to mix the feed gas comprising fluorine with an inert gas;
- and
- a plasma reactor unit disposed within the housing operable to separate fluorine (F2) from the feed gas comprising fluorine, the plasma reactor unit having:
- a first inlet channel operable to receive the feed gas comprising fluorine;
- and
- an outlet channel operable to deliver the fluorine (F2) gas, wherein the dilution system is positioned upstream of the plasma reactor unit.
6 more elements
A method for generating fluorine gas (F2), comprising:
- providing a feed gas comprising fluorine into a fluorine generator module, wherein the fluorine generator module comprises a dilution system and a plasma reactor unit;
- dissociating the feed gas comprising fluorine into reaction products using a plasma formed by the plasma reactor unit, wherein the reaction products comprise fluorine gas;
- mixing the feed gas comprising fluorine or the fluorine gas with nitrogen gas in the dilution system;
- and
- calibrating analytical equipment with the fluorine gas.
2 more elements
Dependencies are inferred from the claim text.