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US 2022/0326599 A1Published application
Mask plate
AssigneesBeijing Boe Display Technology Co., Ltd., Boe Technology Group Co., Ltd.
InventorsJiabin ZOU, Xiaofeng YIN, Chunguang TIAN, Na WEN
Life of this patent
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Abstract
A mask is provided that includes a first graphic region and a second graphic region disposed along a first direction. The first graphic region comprises a first splicing exposure region. The second graphic region comprises a second splicing exposure region. The first splicing exposure region is used for, after being translated along a first vector, forming a first splicing auxiliary region, and the first splicing auxiliary region coincides with the second splicing exposure region.
Claims11
A mask, comprising:
- a first graphic region and a second graphic region disposed along a first direction, wherein the first graphic region comprises a first splicing exposure region, the second graphic region comprises a second splicing exposure region, the first splicing exposure region is used for, after being translated along a first vector, forming a first splicing auxiliary region, and the first splicing auxiliary region coincides with the second splicing exposure region;
- a plurality of light-shielding strips arranged along a second direction, the second direction being perpendicular to the first direction, wherein any one of the light-shielding strips comprises a first splicing light-shielding strip and a second splicing light-shielding strip correspondingly disposed;
- the first splicing light-shielding strip is provided in the first splicing exposure region, and penetrates the first splicing exposure region in the first direction;
- and the second splicing light-shielding strip is provided in the second splicing exposure region, and penetrates the second splicing exposure region in the first direction;
- and
- a width of one of the first splicing light-shielding strip and corresponding second splicing light-shielding strip is equal to a target width, a width of the other one is equal to a first auxiliary width, and the first auxiliary width is greater than the target width;
- a pattern of the first splicing light-shielding strip is used for, after being translated along the first vector, forming a first auxiliary splicing pattern;
- and the first auxiliary splicing pattern is located within the corresponding second splicing light-shielding strip, or the first auxiliary splicing pattern covers the corresponding second splicing light-shielding strip.
5 more elements
A method, comprising:
- providing a mask, the mask comprising:
- a first graphic region and a second graphic region disposed along a first direction, wherein the first graphic region comprises a first splicing exposure region, the second graphic region comprises a second splicing exposure region, the first splicing exposure region is used for, after being translated along a first vector, forming a first splicing auxiliary region, and the first splicing auxiliary region coincides with the second splicing exposure region;
- a plurality of light-shielding strips arranged along a second direction, the second direction being perpendicular to the first direction, wherein any one of the light-shielding strips comprises a first splicing light-shielding strip and a second splicing light-shielding strip correspondingly disposed;
- the first splicing light-shielding strip is provided in the first splicing exposure region, and penetrates the first splicing exposure region in the first direction;
- and the second splicing light-shielding strip is provided in the second splicing exposure region, and penetrates the second splicing exposure region in the first direction;
- and
- a width of one of the first splicing light-shielding strip and corresponding second splicing light-shielding strip is equal to a target width, a width of the other one is equal to a first auxiliary width, and the first auxiliary width is greater than the target width;
- a pattern of the first splicing light-shielding strip is used for, after being translated along the first vector, forming a first auxiliary splicing pattern;
- and the first auxiliary splicing pattern is located within the corresponding second splicing light-shielding strip, or the first auxiliary splicing pattern covers the corresponding second splicing light-shielding strip.
6 more elements
Dependencies are inferred from the claim text.