Fluid supply system
AssigneeFujikin Incorporated
InventorsRYOHEI TAKASAWA, NAOTO TAGASHIRA, TERUYUKI FUNABIKI, MASANORI UEBAYASHI
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AssigneeFujikin Incorporated
InventorsRYOHEI TAKASAWA, NAOTO TAGASHIRA, TERUYUKI FUNABIKI, MASANORI UEBAYASHI
Estimating the term…
A fluid supply system includes: a support body having: a base plate; a side plate provided on one side of the base plate in the longitudinal direction so as to be orthogonal to the base plate; and a top plate provided on one end of the base plate in the height direction so as to be orthogonal to the base plate and the side plate; a process-gas supply unit provided on an outer surface of the top plate; a liquid supply unit provided on an inner surface of the side plate so as to communicate with the process-gas supply unit via a communication-flow-channel forming block; and a purge-gas supply unit provided on an inner surface of base plate so as to communicate with the process-gas supply unit via a communication pipe.
A fluid supply system comprising:
Dependencies are inferred from the claim text.