Substrate processing system and substrate processing method
AssigneeTokyo Electron Limited
InventorKoji MAEDA
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Abstract
There is provided a substrate processing system comprising: a plurality of transfer modules having transfer mechanisms configured to transfer substrates; and a plurality of process modules connected to the plurality of transfer modules. The transfer mechanisms of the plurality of transfer modules transfer a plurality of substrates sequentially and serially to the plurality of process modules, and each of the plurality of transfer modules has an aligner configured to align a substrate when transferring the substrate to the process module connected to a relevant transfer module.
Claims20
A substrate processing system comprising:
- a plurality of transfer modules having transfer mechanisms configured to transfer substrates;
- and
- a plurality of process modules connected to the plurality of transfer modules,
- wherein the transfer mechanisms of the plurality of transfer modules transfer a plurality of substrates sequentially and serially to the plurality of process modules, and
- each of the plurality of transfer modules has an aligner configured to align a substrate when transferring the substrate to the process module connected to a relevant transfer module.
A substrate processing method comprising:
- preparing a substrate processing system including a plurality of transfer modules having transfer mechanisms configured to transfer substrates and a plurality of process modules connected to the plurality of transfer modules;
- sequentially and serially transferring the substrates to the plurality of process modules by the transfer mechanisms respectively disposed in the transfer modules;
- aligning a substrate by an aligner at the time of transferring the substrate to the process module connected to a relevant transfer module by the transfer mechanism in each of the transfer modules;
- and
- processing the substrates in the plurality of process modules.
Dependencies are inferred from the claim text.