Power Supply Module and Charged Particle Beam Device

A charged particle beam device comprising:

• an electron source;
• an extraction electrode that extracts electrons from the electron source;
• an extraction electrode power supply that generates a voltage to be applied to the extraction electrode;
• and
• an acceleration power supply that accelerates the electrons, wherein
• at least one of the extraction electrode power supply and the acceleration power supply includes
• a symmetric high-voltage generation circuit that includes booster circuits of two systems that are configured to be symmetrical to each other, and that performs a boosting operation by using a capacitive element and a diode in the booster circuits of the two systems,
• a housing that houses the high-voltage generation circuit and to which a reference power supply voltage is to be applied,
• a first electrode that is fixedly provided in a vicinity of one of the booster circuits of the two systems in the housing,
• a second electrode that is fixedly provided in a vicinity of the other of the booster circuits of the two systems in the housing, and
• a stray capacitance adjustment circuit that adjusts a capacitance value of a stray capacitance of the booster circuits of the two systems by electrically controlling an electrical connection characteristic between the first electrode and the reference power supply voltage, and an electrical connection characteristic between the second electrode and the reference power supply voltage.