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US 2022/0317077 A1Published application
Fluid sensor for sensing properties of a fluid comprising a tuning fork mechanical resonator
AssigneeMEAS France
InventorsFabien Gayrard, Antoine Sirven, Vincent Ducere
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Abstract
A fluid sensor includes a tuning fork mechanical resonator including a base and a tine projecting from the base along a longitudinal direction of the tine, and a pair of electrodes disposed on the tine. The base and the tine are formed from a piezoelectric material including lithium tantalate. The electrodes are exposed to a fluid.
Claims14
A fluid sensor, comprising:
- a tuning fork mechanical resonator including a base and a tine projecting from the base along a longitudinal direction of the tine, the base and the tine are formed from a piezoelectric material including lithium tantalate;
- and
- a pair of electrodes disposed on the tine, the electrodes are exposed to a fluid.
Dependencies are inferred from the claim text.