Waveguide amplifier

A method for producing a strip waveguide amplifier comprising:

• providing a silicon substrate;
• depositing silicon dioxide on the silicon substrate to form a silica layer thereon;
• depositing silicon nitride layer on the silica layer;
• and
• coating the silica layer and the silicon nitride layer with an erbium-doped aluminum oxide layer deposited by atomic layer deposition (ALD).

A waveguide amplifier comprising

• a silicon substrate;
• an optical quality silicon dioxide (silica) layer formed on the substrate;
• a silicon nitride layer formed on the silica layer;
• and
• a rare-earth material-doped aluminum oxide layer on the silica and the silicon nitride layers,
• wherein the rare-earth material doped aluminum oxide layer is deposited by atomic layer deposition (ALD),
• wherein the doping concentration of the rare-earth material is progressively decreased perpendicularly to the surface plane of the silicon substrate.

A method for producing waveguide amplifier comprising:

• providing a silicon substrate;
• depositing silicon dioxide on the silicon substrate to form a silica layer thereon;
• depositing silicon nitride layer on the silica layer;
• and
• coating the silica layer and the silicon nitride layer with a rare-earth material-doped aluminum oxide layer deposited by atomic layer deposition (ALD),
• wherein the doping concentration of the rare-earth material is progressively decreased perpendicularly to the plane of the substrate when moving away from the substrate.