Processing apparatus
AssigneeDisco Corporation
InventorTakafumi OMORI
Life of this patent
Estimating the term…
Abstract
A processing apparatus includes a holding table for holding a workpiece thereon, a processing unit for processing the workpiece held on the holding table, an image capturing unit for capturing an image of the workpiece held on the holding table, and a control unit. The control unit includes a wider image displaying section for combining images of a plurality of adjacent areas that are captured by the image capturing unit into a wider image representing an area wider than the field of vision of the image capturing unit, and displaying the wider image on a display unit, and a target registering section for registering any pattern on each of the devices that is specified in the wider image, as a target for detecting one of the projected dicing lines.
Claims3
A processing apparatus for processing a workpiece having a plurality of devices in respective areas demarcated on a face side thereof by a plurality of projected dicing lines, along the projected dicing lines, comprising:
- a holding table for holding the workpiece thereon;
- a processing unit for processing the workpiece held on the holding table;
- an image capturing unit for capturing an image of the workpiece held on the holding table;
- and
- a control unit,
- wherein the control unit includes
- a wider image displaying section for combining images of a plurality of adjacent areas that are captured by the image capturing unit into a wider image representing an area wider than a field of vision of the image capturing unit, and displaying the wider image on a display unit, and
- a target registering section for registering any pattern on each of the devices that is specified in the wider image, as a target for detecting one of the projected dicing lines.
Dependencies are inferred from the claim text.