Magnetic sensor
AssigneeShowa Denko K.K.
InventorsDaizo ENDO, Akira SAKAWAKI
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Abstract
A magnetic sensor 1 includes: a non-magnetic substrate 10; and a sensitive element 30 disposed on the substrate 10. The sensitive element 30 has a longitudinal direction and a transverse direction and has a uniaxial magnetic anisotropy in a direction intersecting the longitudinal direction. The sensitive element 30 is configured to sense a magnetic field by a magnetic impedance effect. The sensitive element 30 includes a soft magnetic material layer 101 made of an amorphous alloy based on Co and having a saturation magnetization of greater than or equal to 300 emu/cc and less than or equal to 650 emu/cc.
Claims12
A magnetic sensor comprising:
- a non-magnetic substrate;
- and
- a sensitive element disposed on the substrate, the sensitive element having a longitudinal direction and a transverse direction, the sensitive element having a uniaxial magnetic anisotropy in a direction intersecting the longitudinal direction, the sensitive element being configured to sense a magnetic field by a magnetic impedance effect, the sensitive element including a soft magnetic material layer made of an amorphous alloy based on Co, the soft magnetic material layer having a saturation magnetization of greater than or equal to 300 emu/cc and less than or equal to 650 emu/cc.
A magnetic sensor comprising:
- a non-magnetic substrate;
- a sensitive element disposed on the substrate, the sensitive element having a longitudinal direction and a transverse direction, the sensitive element having a uniaxial magnetic anisotropy in a direction intersecting the longitudinal direction, the sensitive element being configured to sense a magnetic field by a magnetic impedance effect, the sensitive element including a soft magnetic material layer made of an amorphous alloy containing 3 at % Zr and greater than or equal to 17 at % and less than 21 at % Nb with a balance of Co.
Dependencies are inferred from the claim text.