Metrology method and apparatus for of determining a complex-valued field
AssigneeASML Netherlands B.V.
InventorsAlexander Prasetya KONIJNENBERG, Willem Marie Julia Marcel COENE, Nitesh PANDEY
Life of this patent
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Abstract
Disclosed is a method of determining a complex-valued field relating to a sample measured using an imaging system. The method comprises obtaining image data relating to a series of images of the sample, imaged at an image plane of the imaging system, and for which at least two different modulation functions are imposed in a Fourier plane of the imaging system; and determining the complex-valued field from the imaging data based on the imposed modulation functions.
Claims16
-15. (canceled)
A method, comprising:
- imaging, by an imaging system, a field reflected from a sample;
- imposing, at a Fourier plane of the imaging system, at least two different modulation functions in the reflected field;
- detecting, at an image plane of the imaging system, a series of images of the sample;
- obtaining image data relating to the series of images of the sample;
- and
- determining the complex-valued field from the imaging data based on the imposed modulation functions.
A non-transitory computer readable medium comprising processor readable instructions which, when run on a processor controlled apparatus, cause the processor controlled apparatus to perform the method comprising:
- imaging a field reflected from a sample;
- imposing, at a Fourier plane of an imaging system, at least two different modulation functions in the reflected field;
- detecting, at an image plane of the imaging system, a series of images of the sample;
- obtaining image data relating to a series of images of the sample, imaged at an image plane of the imaging system, and for which at least two different modulation functions are imposed in a Fourier plane of the imaging system;
- and
- determining the complex-valued field from the imaging data based on the imposed modulation functions when run on a suitable apparatus.
Dependencies are inferred from the claim text.