Getter cartridge for toxic gases inside valves
AssigneeMatheson Tri-Gas, Inc.
InventorsMark Raynor, Rikard Wind
Life of this patent
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Abstract
The present invention relates to cylinder packages utilized in the delivery of highly toxic and/or flammable compounds to semiconductor manufacturers. More specifically, the present invention provides a cartridge adapted to removably attach to the gas outlet of a gas discharge passageway in a cylinder valve provided on a toxic gas containing cylinder package, the cartridge comprising a cylindrically shaped housing having at least one end fitted with a barrier member permeable to the toxic gas contained within the cylinder package and the housing containing a toxic-gas getter material.
Claims21
A getter cartridge for operatively coupling to a gas discharge passageway of a cylinder valve installed on a cylinder package containing a toxic and/or flammable gas, the getter cartridge comprising:
- a cartridge housing body having an open end and a closed top end, and a center core extending along a housing longitudinal axis through the open end;
- an absorbing means contained within said cartridge housing body between said open end and said closed top end;
- an end cap having a through-hole centrally formed therein covering said open end of said cartridge housing;
- a positioning ring extending from said end cap, said positioning ring fitting configured to be received by said open end;
- a barrier member positioned within said centrally formed hole which is permeable to said gas, and in fluid communication with said filter media;
- and a sealing member extending from the said cartridge housing body disposed along the outer edge which is configured to seal against an inside surface of the gas discharge passageway when said getter cartridge is installed in the cylinder valve.
A getter cartridge for operatively coupling to a gas discharge passageway of a cylinder valve installed on a cylinder package containing a toxic/flammable gas, the getter cartridge comprising:
- a cartridge housing having a first end and a second end forming a longitudinal axis and a bore extending along said longitudinal axis through said first end and said second end;
- a filter media contained within said bore between said first end and said second end;
- a first end cap covering said first end of the cartridge housing;
- said first end cap having a through-hole centrally formed therein covering said first end of said cartridge housing;
- a first positioning ring extending from said first end cap, said first positioning ring fitting configured to be received by said first end;
- a second end cap covering said second end of said cartridge housing;
- said second end cap having a through-hole centrally formed therein covering said second end of said cartridge housing;
- a second positioning ring extending from said second end cap, said second positioning ring fitting configured to be received by said second end;
- and a barrier member positioned within said centrally formed hole which is permeable to the gas, and in fluid communication with said filter media.
A getter cartridge comprising:
- a cartridge housing body having an open end and a closed top end, and a center core extending along a housing longitudinal axis through the open end;
- an absorbing means contained within said cartridge housing body between said open end and said closed top end;
- an end cap having a through-hole centrally formed therein covering said open end of said cartridge housing;
- a positioning ring extending from said end cap, said positioning ring fitting configured to be received by said open end;
- a barrier member positioned within said centrally formed hole which is permeable to said gas, and in fluid communication with said filter media;
- and a sealing member extending from the said cartridge housing body disposed along the outer edge which is configured to seal against an inside surface of the gas discharge passageway when said getter cartridge is installed in the cylinder valve.
Dependencies are inferred from the claim text.