# US 2022/0285191 A1 · Substrate transfer device and substrate processing system

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- Number: US 2022/0285191 A1
- Document ID: US20220285191A1
- Status: Published application
- Kind: A1
- Application number: 17/652,334
- Filed: 2022-02-24
- Published: 2022-09-08
- Earliest claimed: 2021-03-02
- Assignees: Tokyo Electron Limited
- Applicants: Tokyo Electron Limited
- Inventors: Dongwei LI; Takehiro SHINDO
- Web page: https://patentgrep.com/patent/US20220285191A1

## CPC

- H10P 72/3302: {Mechanical parts of transfer devices}
- H10P 72/0464: {characterised by the construction of the transfer chamber}
- H10P 72/3304: {characterised by movements or sequence of movements of transfer devices}
- H10P 72/7602: {the wafers being placed on a robot blade or gripped by a gripper for conveyance}
- H10P 72/0466: {characterised by the construction of the load-lock chamber}
- H10P: GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10

## Abstract

A substrate transfer device includes: a planar motor provided in a transfer chamber and including an array of coils; a transfer unit configured to move above the planar motor; and a controller configured to control supply of a current to the array of the coils, wherein the transfer unit includes: a first base including an array of first magnets and configured to move above the planar motor; a second base including an array of second magnets and configured to move above the planar motor, the second base being arranged coaxially with the first base; and at least one arm configured to be extended/contracted by rotating the second base relative to the first base.

## Claims

### Claim 1

A substrate transfer device comprising:
a planar motor provided in a transfer chamber and including an array of coils;
a transfer unit configured to move above the planar motor; and
a controller configured to control supply of a current to the array of the coils,
wherein the transfer unit includes:
a first base including an array of first magnets and configured to move above the planar motor;
a second base including an array of second magnets and configured to move above the planar motor, the second base being arranged coaxially with the first base; and
at least one arm configured to be extended/contracted by rotating the second base relative to the first base.

### Claim 2 (depends on 1)

The substrate transfer device of claim 1, wherein the transfer unit includes:
a base mount connected to the first base;
a drive arm connected to the second base and configured to be rotatable relative to the base mount; and
the at least one arm configured to be further extended/contracted with an operation of the drive arm.

### Claim 3 (depends on 2)

The substrate transfer device of claim 2, wherein the at least one arm of the transfer unit includes a pair of arms, and
one arm of the pair of arms is extended and the other arm of the pair of arms is contracted with the operation of the drive arm.

### Claim 4 (depends on 3)

The substrate transfer device of claim 3, wherein the at least one arm includes a pick configured to hold a substrate, and
the controller is further configured to control floating amounts of the first base and the second base to raise and lower the pick.

### Claim 5 (depends on 4)

The substrate transfer device of claim 4, wherein the controller is further configured to control, when moving the transfer unit, the floating amounts of the first base and the second base to cause the first base and the second base to be tilted so as to tilt the pick.

### Claim 6 (depends on 1)

The substrate transfer device of claim 1, wherein the at least one arm includes a pick configured to hold a substrate, and
the controller is further configured to control floating amounts of the first base and the second base to raise and lower the pick.

### Claim 7

A substrate processing system comprising:
a plurality of chambers;
a transfer chamber connecting the plurality of chambers; and
the substrate transfer device provided with a planar motor provided in the transfer chamber and including an array of coils; a transfer unit configured to move above the planar motor; and a controller configured to control supply of a current to the array of the coils, wherein the transfer unit includes: a first base including an array of first magnets and configured to move above the planar motor; a second base including an array of second magnets and configured to move above the planar motor, the second base being arranged coaxially with the first base; and at least one arm configured to be extended/contracted by rotating the second base relative to the first base.

### Claim 8 (depends on 7)

The substrate processing system of claim 7, wherein the transfer chamber is a vacuum transfer chamber in a vacuum atmosphere.

### Claim 9 (depends on 8)

The substrate processing system of claim 8, wherein the planar motor is arranged in a space in an air atmosphere through a wall surface of the vacuum transfer chamber.

### Claim 10 (depends on 9)

The substrate processing system of claim 9, wherein the planar motor includes:
a first planar motor arranged on a floor portion of the transfer chamber; and
a second planar motor arranged on a ceiling portion of the transfer chamber, and
wherein the transfer unit includes:
a first transfer unit configured to move above the first planar motor; and
a second transfer unit configured to move above the second planar motor.

### Claim 11 (depends on 7)

The substrate processing system of claim 7, wherein the planar motor includes:
a first planar motor arranged on a floor portion of the transfer chamber; and
a second planar motor arranged on a ceiling portion of the transfer chamber, and
wherein the transfer unit includes:
a first transfer unit configured to move above the first planar motor; and
a second transfer unit configured to move above the second planar motor.