Exhaust system and process equipment
AssigneeTaiwan Semiconductor Manufacturing Company, Ltd.
InventorsHsien-Chang HSIEH, Chun-Chih LIN, Tah-te SHIH, Wen-Hsong WU, Chune-Te YANG, Yu-Jen SU
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Abstract
An exhaust structure includes a piping section, wherein the piping section has a first inner diameter in a central region of the piping section, the piping section has a second diameter in at least one of an inlet or an outlet, and the second diameter has a same value as the first inner diameter. The exhaust structure further includes a plurality of smoothing layers configured to resist turbulence and condensation produced by a flow of one or more gasses in the piping section.
Claims20
An exhaust structure comprising:
- a piping section, wherein the piping section has a first inner diameter in a central region of the piping section, the piping section has a second diameter in at least one of an inlet or an outlet, and the second diameter has a same value as the first inner diameter;
- and
- a plurality of smoothing layers configured to resist turbulence and condensation produced by a flow of one or more gasses in the piping section.
A process equipment comprising:
- a process chamber configured to receive a substrate;
- and
- an exhaust system connected to the process chamber, wherein the exhaust system comprises:
- a piping section, wherein the piping section has uniform inner diameter;
- and
- a plurality of smoothing layers configured to resist turbulence and condensation produced by a flow of one or more gasses in the piping section.
An exhaust structure comprising:
- a piping section, wherein the piping section has a first inner diameter in a central region of the piping section, the piping section has a second diameter at an inlet, and the second diameter has a same value as the first inner diameter;
- an input section attached to the inlet;
- and
- a plurality of smoothing layers configured to resist turbulence and condensation produced by a flow of one or more gasses in the piping section.
Dependencies are inferred from the claim text.