# US 2022/0285124 A1 · Aberration correction in charged particle system > Agents: this data is available as JSON from the patentgrep API and MCP server — see https://patentgrep.com/llms.txt - Number: US 2022/0285124 A1 - Document ID: US20220285124A1 - Status: Published application - Kind: A1 - Application number: 17/824,831 - Filed: 2022-05-25 - Published: 2022-09-08 - Earliest claimed: 2012-05-14 - Assignees: ASML Netherlands B.V. - Applicants: ASML Netherlands B.V. - Inventors: Alexander Hendrik Vincent VAN VEEN; Willem Henk URBANUS; Marco Jan-Jaco WIELAND - Web page: https://patentgrep.com/patent/US20220285124A1 ## CPC - H01J 37/153: Electron-optical or ion-optical arrangements for the correction of image defects, e.g. stigmators - H01J 37/065: Construction of guns or parts thereof (H01J37/067 - H01J37/077 take precedence) - H01J 37/09: Diaphragms; Shields associated with electron or ion-optical arrangements; Compensation of disturbing fields - H01J 37/12: electrostatic - H01J 37/023: {Means for mechanically adjusting components not otherwise provided for} - H01J 37/3177: {Multi-beam, e.g. fly's eye, comb probe} - H01J 2237/0213: Avoiding deleterious effects due to interactions between particles and tube elements - H01J 2237/0264: magnetic - H01J 2237/0453: multiple apertures - H01J 2237/1207: Einzel lenses - H01J 2237/1534: Aberrations - H01J 2237/1825: Evacuating means - H01J 2237/188: Differential pressure - H01J 2237/31774: Multi-beam - H01J 2237/31793: Problems associated with lithography - H01J: ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS (spark-gaps H01T; electric arc lamps H05B31/00; particle accelerators H05H) ## Abstract A lens element of a charged particle system comprises an electrode having a central opening. The lens element is configured for functionally cooperating with an aperture array that is located directly adjacent said electrode, wherein the aperture array is configured for blocking 5 part of a charged particle beam passing through the central opening of said electrode. The electrode is configured to operate at a first electric potential and the aperture array is configured to operate at a second electric potential different from the first electric potential. The electrode and the aperture array together form an aberration correcting lens. ## Claims ### Claim at position 1 1-27. (canceled) ### Claim 28 A lens element of a charged particle system, comprising: a body having a cavity formed therein for a path of a charged particle beam; and a cooling arrangement for cooling the lens elements, comprising one or more channels configured to accommodate a fluid flowing around the path of the charged particle beam, wherein the one or more channels are formed within a solid structure of the body. ### Claim 29 (depends on 28) The lens element of claim 28, wherein the cooling arrangement comprises one or more lateral channels extending in a substantially rotational direction around the path of the charged particle beam in circumference of the cavity. ### Claim 30 (depends on 29) The lens element of claim 29, wherein the cooling arrangement further comprises a longitudinal channel connected to at least two of the one or more lateral channels. ### Claim 31 (depends on 30) The lens element of claim 30, wherein the longitudinal channel has at least one section that extends in a radial direction to the path of the charged particle beam. ### Claim 32 (depends on 30) The lens element of claim 30, wherein the longitudinal channel has a section arranged for fluid flow in a substantially opposite direction of fluid flow via the lateral channels. ### Claim 33 (depends on 30) The lens element of claim 30, wherein the longitudinal channel has at least one section that extends substantially parallel to the path of the charged particle beam. ### Claim 34 (depends on 28) The lens element of claim 28, wherein the body is an electrode having a central opening through which a beam passes during use of the charged particle system. ### Claim 35 (depends on 28) The lens element of claim 28, wherein a surface of the body forming the cavity is configured to be an electrode of the lens element. ### Claim 36 (depends on 28) The lens element of claim 28, wherein the lens element is an Einzel lens. ### Claim 37 (depends on 28) The lens element of claim 28, wherein the lens element is included in a collimator system comprising a plurality of collimator lenses. ### Claim 38 A charged particle system, comprising: a beam source for generating a charged particle beam; a body having a cavity formed therein for a path of the charged particle beam; and a cooling arrangement comprising one or more channels configured to accommodate a fluid flowing around the path of the charged particle beam, wherein the one or more channels are formed within a solid structure of the body for cooling the body. ### Claim 39 (depends on 38) The charged particle system of claim 38, wherein the cooling arrangement comprises one or more supply channels extending in a substantially rotational direction around the path of the charged particle beam in circumference of the cavity. ### Claim 40 (depends on 38) The charged particle system of claim 38, wherein the cooling arrangement comprises one or more side channels having at least one section that extends in a radial direction to the path of the charged particle beam. ### Claim 41 (depends on 39) The charged particle system of claim 39, wherein the cooling arrangement further comprises a side channel arranged for transferring a portion of the fluid supplied via the supply channels in a direction substantially parallel to the path of the charged particle beam. ### Claim 42 (depends on 41) The charged particle system of claim 41, wherein the side channel has a first section and a second section that both extend parallel to the path of the charged particle beam, and the first section being arranged for fluid flow in a substantially opposite direction of fluid flow via the second section. ### Claim 43 (depends on 38) The charged particle system of claim 38, wherein a surface of the body forming the cavity is configured to be an electrode of a lens element. ### Claim 44 A cooling arrangement of a lens element, comprising: one or more channels for cooling the lens element, configured to accommodate a fluid flowing around a path of a charged particle beam, wherein the one or more channels are formed within a solid structure of a body of the lens element. ### Claim 45 (depends on 44) The cooling arrangement of claim 44, wherein the one or more channels comprise one or more first channels extending in a substantially rotational direction around the path of the charged particle beam in circumference of the cavity. ### Claim 46 (depends on 45) The cooling arrangement of claim 45, wherein the one or more channels further comprise a second channel arranged for transferring a portion of the fluid supplied via the first channels in a direction substantially parallel to the path of the charged particle beam. ### Claim 47 (depends on 44) The cooling arrangement of claim 44, wherein the one or more channels are formed within the body using a laser drilling, laser welding, or brazing.