Display method and control device
AssigneeTokyo Electron Limited
InventorRyota AOI
Life of this patent
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Abstract
A display method includes storing, in a storage unit, first history information in which a processing is executed by a substrate processing apparatus based on a recipe; storing, in the storage unit, second history information in which an execution instruction for a job is received to instruct execution of the processing; and calculating, based on the first history information and the second history information, a first idle time indicating a time during which the processing is not performed and a second idle time indicating a time from an end of the job to a start of execution of a next job, and displaying the first idle time and the second idle time.
Claims10
A display method comprising:
- storing, in a memory, first history information in which a processing is executed by a substrate processing apparatus based on a recipe;
- storing, in the memory, second history information in which an execution instruction for a job is received to instruct execution of the processing;
- and
- calculating, based on the first history information and the second history information, a first idle time during which the processing is not performed and a second idle time from an end of the job to a start of a next job, and displaying the first idle time and the second idle time.
A control device comprising:
- a memory;
- and
- a processor coupled to the memory and configured to execute a process including:
- storing, in the memory, first history information in which a processing is executed by a substrate processing apparatus based on a recipe;
- storing, in the memory, second history information in which an execution instruction for a job is received to instruct execution of the processing;
- and
- calculating, based on the first history information and the second history information, a first idle time during which the processing is not performed and a second idle time from an end of the job to a start of a next job, and displaying the first idle time and the second idle time.
Dependencies are inferred from the claim text.