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US 2022/0263036 A1Published application
Modification of stress response and adhesion behavior of dielectric through tuning of mechanical properties
AssigneeFlexenable Limited
InventorsRashmi Sachin BHINTADE, Tomas BACKLUND
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Abstract
The disclosed subject matter relates to a dielectric stack that includes a dielectric layer formed from a dielectric material that includes one or more constituent components each having a Tg value of 70° C. or lower and that is annealed at a temperature exceeding the highest Tg value of the one or more constituent components.
Claims18
A dielectric material for forming a dielectric layer in a dielectric stack comprising one or more constituent components each having a Tg value of 70° C. or lower.
A process for preparing dielectric comprising the steps of:
- (i) preparing a dielectric material comprising one or more constituent components each having a Tg value of 70° C. or lower;
- (ii) applying the dielectric material of to a polymeric organic semiconductor layer;
- (iii) forming a dielectric layer on the polymeric organic semiconductor by annealing the dielectric material at a temperature exceeding the Tg value of the constituent components;
- and (iv) optionally applying a vapor deposited dielectric to the dielectric layer,
- wherein the dielectric material is applied to the polymeric organic semiconductor layer in sufficient quantity such that the dielectric layer has a thickness of 200 nm or greater after annealing.
2 more elements
Dependencies are inferred from the claim text.