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US 2022/0235485 A1Published application
Apparatus of oxidation-combusting an ingot grower and method thereof
AssigneeSK Siltron Co., Ltd.
InventorJung Ryul KIM
Life of this patent
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Abstract
A method of oxidation-combusting an ingot grower comprises a) blocking between the filter housing and the exhaust pipe, b) forming the filter housing in a vacuum state, and c) injecting air into the filter housing through an injection pipe connected to a first side of the filter housing to combust the filter housing.
Claims17
A method of oxidation-combusting an ingot grower comprising a chamber, an exhaust pipe connected to the chamber, and a filter housing connected to the exhaust pipe, the method comprising:
- a) blocking between the filter housing and the exhaust pipe;
- b) forming the filter housing in a vacuum state;
- and
- c) injecting air into the filter housing through an injection pipe connected to a first side of the filter housing to combust the filter housing.
1 more element
A apparatus of oxidation-combusting an ingot grower, the apparatus comprises:
- a chamber;
- an exhaust pipe connected to the chamber;
- a filter housing connected to the exhaust pipe;
- an injection pipe connected to a first side of the filter housing;
- and
- a controller,
- wherein the controller is configured to:
- block between the filter housing and the exhaust pipe and forming the filter housing in a vacuum state, and
- inject air into the filter housing through the injection pipe to combust the filter housing.
6 more elements
Dependencies are inferred from the claim text.