Dual-Output Microelectromechanical Resonator and Method of Manufacture and Operation Thereof

A system comprising:

• a first oscillator electrically connectable to a microelectromechanical system (MEMS) resonator for operating the MEMS resonator in an in-plane mode of vibration to obtain a first electrical signal having a first frequency;
• a second oscillator electrically connectable to the MEMS resonator for operating, concurrently with the operating by the first oscillator, the MEMS resonator in an out-of-plane mode of vibration to obtain a second electrical signal having a second frequency lower than the first frequency;
• a mixing circuit for mixing the first and second electrical signals together to obtain a third electrical signal having a third frequency, the third frequency being proportional to a temperature of the MEMS resonator;
• and
• a temperature determining circuit for (i) determining a temperature of the MEMS resonator based on the third frequency of the third electrical signal and (ii) outputting an indication of the determined temperature.

A system comprising:

• a first oscillator electrically connectable to a microelectromechanical system (MEMS) resonator for operating the MEMS resonator in an in-plane mode of vibration to obtain a first electrical signal having a first frequency;
• a second oscillator electrically connectable to the MEMS resonator for operating, concurrently with the operating by the first oscillator, the MEMS resonator in an out-of-plane mode of vibration to obtain a second electrical signal having a second frequency lower than the first frequency;
• a mixing circuit for mixing the first and second electrical signals together, to obtain a third electrical signal having a third frequency, the third frequency being proportional to a temperature of the MEMS resonator;
• a temperature determining circuit for determining a temperature of the MEMS resonator based on the third frequency of the third electrical signal;
• and
• a compensation unit for (i) adjusting a value of at least one of the first frequency of the first electrical signal or the second frequency of the second electrical signal based on the determined temperature to obtain a temperature compensated frequency signal and (ii) outputting the temperature compensated frequency signal.