Back to results
US 2022/0223345 A1Published application
Gas capacitor for semiconductor tool
AssigneeFabworx Solutions, Inc.
InventorsTOM RANDALL, MICHAEL DAILEY, THOMAS E. WALTON
Life of this patent
Estimating the term…
Abstract
A system is provided which includes a gas supply; a fluidic circuit which includes first and second sub-circuits, wherein said first sub-circuit includes a first one-way valve, and wherein said second sub-circuit includes a second one-way valve and a gas capacitor disposed downstream of said second one-way valve; and a pneumatically operated semiconductor tool in fluidic communication with said gas supply by way of said fluidic circuit.
Claims17
A gas capacitor in combination with a semiconductor tool, wherein said semiconductor tool comprises:
- a gas supply line which supplies gas from a remote gas source and which is equipped with a first one-way valve,
- a central chamber, and
- a plurality of process chambers,
- wherein each of said plurality of process chamber is equipped with a pneumatically actuated valve which is in fluidic communication with the gas supply line and which transforms the process chamber from a first state in which the process chamber is in fluidic communication with said central chamber, to a second state in which the process chamber is fluidically isolated from said central chamber;
- and
- wherein said gas capacitor comprises:
- a pressurized gas reservoir which is disposed downstream from said one-way valve, and which is in fluidic communication with said plurality of process chambers.
4 more elements
A system, comprising:
- a gas supply;
- a fluidic circuit which includes first and second sub-circuits, wherein said first sub-circuit includes a first one-way valve, and wherein said second sub-circuit includes a second one-way valve and a gas capacitor disposed downstream of said second one-way valve;
- and
- a pneumatically operated semiconductor tool in fluidic communication with said gas supply by way of said fluidic circuit.
1 more element
Dependencies are inferred from the claim text.