Method for generating three-dimensional shape information of object to be measured, defect detection method, and defect detection device

A system for generating three-dimensional (3D) shape information of an object, the system comprising:

• means for acquiring an image including intensity information of an object hologram generated by interference between a reference light reflected from an optical mirror and an object light affected by the object;
• means for extracting real image components corresponding to a real image from the at least one frequency component included in the image;
• means for generating a correction light and a real image hologram based on the real image components, the correction light being in a conjugate relation with the reference light and the real image hologram including real image information of the object;
• means for generating an intermediate hologram based on the correction light, the intermediate hologram resulting from removing information of the reference light from the real image hologram;
• means for generating curvature aberration correction information from the intermediate hologram;
• means for generating a correction hologram based on the curvature aberration correction information, the correction hologram resulting from removing an error caused by a curvature aberration from the intermediate hologram;
• and
• means for generating the 3D shape information of the object from the correction hologram.