Method for cutting polycrystalline silicon rod, method for manufacturing cut rod of polycrystalline silicon rod, method for manufacturing nugget of polycrystalline silicon rod, and polycrystalline silicon rod cutting device
AssigneeTokuyama Corporation
InventorsJunya SAKAI, Hiroyuki TASAKI
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Abstract
Provided is a method for preventing metal contamination during cutting of a polycrystalline silicon rod. A method for cutting a polycrystalline silicon rod (S) includes the step of cutting the polycrystalline silicon rod (S) by using a cutting tool (133). The step of cutting includes: delivering a liquid (L1) to a cutting position of the polycrystalline silicon rod (S) through a first nozzle (14); and delivering a liquid (L2) to a surface of the polycrystalline silicon rod (S) through a second nozzle (15).
Claims8
A method for cutting a polycrystalline silicon rod comprising the step of cutting the polycrystalline silicon rod by using a cutting tool,
- the step of cutting including:
- delivering a liquid to a cutting position of the polycrystalline silicon rod through a first nozzle;
- and
- delivering a liquid to a surface of the polycrystalline silicon rod through a second nozzle.
A method for manufacturing a cut rod of a polycrystalline silicon rod comprising the step of cutting the polycrystalline silicon rod by using a cutting tool, the step of cutting including:
- delivering a liquid to a cutting position of the polycrystalline silicon rod through a first nozzle;
- and
- delivering a liquid to a surface of the polycrystalline silicon rod through a second nozzle.
A polycrystalline silicon rod cutting device comprising:
- a cutting tool for cutting a polycrystalline silicon rod;
- a first nozzle for delivering a liquid to a cutting position of the polycrystalline silicon rod;
- and
- a second nozzle for delivering a liquid to a surface of the polycrystalline silicon rod.
Dependencies are inferred from the claim text.