Calibration system and drawing device
AssigneeInspec Inc.
InventorMasashi SUGAWARA
Life of this patent
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AssigneeInspec Inc.
InventorMasashi SUGAWARA
Estimating the term…
A calibration system includes: an optical system that is provided insertably into and removably from an optical path of the beam that is emitted from the exposure head and enters the exposure surface, the optical system guiding the beam in a direction different from that of the optical path when the optical system is inserted into the optical path; a movement mechanism that inserts and removes the optical system into and from the optical path; and an optical sensor having a light-receiving surface for receiving the beam that is guided by the optical system when the optical system is inserted into the optical path, the optical sensor outputting a detection signal by detecting an irradiation position and an irradiation intensity at the light-receiving surface of the beam that has entered the light-receiving surface.
A calibration system for performing calibration in a drawing device, the drawing device comprising at least one exposure head that emits a beam for exposure toward an exposure surface of the substrate, the substrate having a long-sheet shape and being conveyed in a longitudinal direction by being supported on part of an outer periphery of a conveying drum having a cylindrical shape, comprising:
A drawing device comprising:
Dependencies are inferred from the claim text.