Raw material for forming thin film, method for producing thin film, and scandium compound
AssigneeAdeka Corporation
InventorsNaoki YAMADA, Haruyoshi SATO, Kazuki HARANO
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Abstract
The present invention provides a thin-film forming raw material including a scandium compound represented by the following general formula (1), a method of producing a thin-film including using the thin-film forming raw material, and a novel scandium compound: where R1 represents an alkyl group having 1 to 4 carbon atoms, R2 represents an alkyl group having 2 or 3 carbon atoms, and R3 represents a hydrogen atom or an alkyl group having 1 to 4 carbon atoms.
Claims4
A thin-film forming raw material, comprising a scandium compound represented by the following general formula (1):
- where R1 represents an alkyl group having 1 to 4 carbon atoms, R2 represents an alkyl group having 2 or 3 carbon atoms, and R3 represents a hydrogen atom or an alkyl group having 1 to 4 carbon atoms.
A use of a scandium compound represented by the following general formula (1) for producing a thin-film containing a scandium atom on a surface of a substrate:
- where R1 represents an alkyl group having 1 to 4 carbon atoms, R2 represents an alkyl group having 2 or 3 carbon atoms, and R3 represents a hydrogen atom or an alkyl group having 1 to 4 carbon atoms.
A scandium compound represented by the following general formula (2):
- where R4 and R5 each independently represent an alkyl group having 2 or 3 carbon atoms, and R6 represents a hydrogen atom or an alkyl group having 1 to 4 carbon atoms.
Dependencies are inferred from the claim text.