Filters with bulk acoustic wave devices
AssigneeSkyworks Solutions, Inc.
InventorsYiliu Wang, Jiansong Liu, Nan Wu
Life of this patent
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Abstract
A filter is disclosed. The filter can be a band pass filter or a band rejection filter. The filter can have bulk acoustic wave resonators. The filter can include a shunt bulk acoustic wave resonator and a series bulk acoustic wave resonator. The shunt bulk acoustic wave resonator and the series bulk acoustic wave resonator include different raised frame structures. The different raised frame structures contribute to one of the shunt bulk acoustic wave resonator or the series bulk acoustic wave resonator to have a higher quality factor below a resonant frequency than the other.
Claims20
A band pass filter with bulk acoustic wave resonators, the band pass filter comprising:
- a shunt bulk acoustic wave resonator including a first raised frame structure, the shunt bulk acoustic wave resonator having a first resonant frequency and a first anti-resonant frequency;
- and
- a series bulk acoustic wave resonator including a second raised frame structure, the second raised frame structure being different than the first raised frame structure, the series bulk acoustic wave resonator having a second resonant frequency and a second anti-resonant frequency, the second raised frame structure contributing to the series bulk acoustic wave resonator having a higher quality factor below the second resonant frequency than the shunt bulk acoustic wave resonator has below the first resonant frequency, and the band pass filter having a pass band.
A band rejection filter with bulk acoustic wave resonators, the band rejection filter comprising:
- a series bulk acoustic wave resonator including a first raised frame structure, the series bulk acoustic wave resonator having a first resonant frequency and a first anti-resonant frequency;
- and
- a shunt bulk acoustic wave resonator including a second raised frame structure, the second raised frame structure being different than the first raised frame structure, the shunt bulk acoustic wave resonator having a second resonant frequency and a second anti-resonant frequency, the second raised frame structure contributing to the shunt bulk acoustic wave resonator having a higher quality factor below the second resonant frequency than the series bulk acoustic wave resonator has below the first resonant frequency, and the band pass filter having a rejection band.
A radio frequency module comprising:
- a filter including:
- a shunt bulk acoustic wave resonator including a first raised frame structure, the shunt bulk acoustic wave resonator having a first resonant frequency and a first anti-resonant frequency;
- and
- a series bulk acoustic wave resonator including a second raised frame structure, the second raised frame structure being different than the first raised frame structure, the series bulk acoustic wave resonator having a second resonant frequency and a second anti-resonant frequency, the second raised frame structure contributing to the series bulk acoustic wave resonator having a higher quality factor below the second resonant frequency than the shunt bulk acoustic wave resonator has below the first resonant frequency, and the band pass filter having a pass band;
- and
- a radio frequency circuit element coupled to the filter, the filter and the radio frequency circuit element being enclosed within a common package.
Dependencies are inferred from the claim text.