Adhesion promoting photoresist underlayer composition

A photoresist underlayer composition, comprising:

• a poly(arylene ether);
• an additive of formula (14):
• D-(L1-Ar—[X]n)m (14);
• and
• a solvent,
• wherein, in formula (14),
• D is a substituted or unsubstituted C1-60 organic group, optionally wherein D is an organic acid salt of the substituted or unsubstituted C1-60 organic group;
• each L1 is independently a single bond or a divalent linking group,
• when L1 is a single bond, D may be a substituted or unsubstituted C3-30 cycloalkyl or substituted or unsubstituted C1-20 heterocycloalkyl that is optionally fused with Ar,
• each Ar is independently a monocyclic or polycyclic C5-60 aromatic group,
• each X is independently —OR30, —SR31, or —NR32R33,
• m is an integer of 1 to 6,
• each n is independently an integer of 0 to 5, provided that a sum of all n is 2 or greater,
• R30 to R33 are each independently hydrogen, substituted or unsubstituted C1-30 alkyl, substituted or unsubstituted C1-30 heteroalkyl, substituted or unsubstituted C3-30 cycloalkyl, substituted or unsubstituted C2-30 heterocycloalkyl, substituted or unsubstituted C2-30 alkenyl, substituted or unsubstituted C2-30 alkynyl, substituted or unsubstituted C6-30 aryl, substituted or unsubstituted C7-30 arylalkyl, substituted or unsubstituted C7-30 alkylaryl, substituted or unsubstituted C3-30 heteroaryl, or substituted or unsubstituted C4-30 heteroarylalkyl, each of which except hydrogen optionally further comprises as part of its structure one or more of substituted or unsubstituted C1-30 alkylene, substituted or unsubstituted C3-30 cycloalkylene, substituted or unsubstituted C2-30 alkenylene, substituted or unsubstituted C4-30 cycloalkenylene, substituted or unsubstituted C2-30 alkynylene, substituted or unsubstituted C1-30 heterocycloalkylene, substituted or unsubstituted C6-30 arylene, substituted or unsubstituted C4-30 heteroarylene, —O—, —C(O)—, —C(O)O—, —S—, —S(O)—, —S(O)2—, or —NR34— wherein R34 is substituted or unsubstituted C1-30 alkyl, substituted or unsubstituted C3-30 cycloalkyl, substituted or unsubstituted C1-20 heterocycloalkyl, substituted or unsubstituted C6-30 aryl, substituted or unsubstituted C7-30 arylalkyl, substituted or unsubstituted C7-30 alkylaryl, substituted or unsubstituted C4-30 heteroaryl, substituted or unsubstituted C5-30 heteroarylalkyl, or substituted or unsubstituted C5-30 alkylheteroaryl, and
• when n is 2, optionally any one of R30 to R33 of a first group X is a divalent group, any one of R30 to R33 of a second group X is a divalent group, and the divalent group of the first group X forms a ring together with the divalent group of the second group X, wherein the ring optionally further comprises a linking group comprising one or more of substituted or unsubstituted C1-30 alkylene, substituted or unsubstituted C3-30 cycloalkylene, substituted or unsubstituted C2-30 alkenylene, substituted or unsubstituted C4-30 cycloalkenylene, substituted or unsubstituted C2-30 alkynylene, substituted or unsubstituted C6-30 arylene, —O—, —C(O)—, —C(O)O—, —NR35—, —S—, —S(O)—, or —S(O)2—, wherein R35 is substituted or unsubstituted C1-30 alkyl, substituted or unsubstituted C3-30 cycloalkyl, substituted or unsubstituted C1-20 heterocycloalkyl, substituted or unsubstituted C6-30 aryl, substituted or unsubstituted C7-30 arylalkyl, substituted or unsubstituted C7-30 alkylaryl, substituted or unsubstituted C4-30 heteroaryl, substituted or unsubstituted C5-30 heteroarylalkyl, or substituted or unsubstituted C5-30 alkylheteroaryl.