Gas storage systems and method thereof
AssigneeEntegris, Inc.
InventorsOleg Byl, Diego Troya, Nathan B. Jones, John R. Morris
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Abstract
Described are gas storage medium and methods of storing source gases in the gas storage medium, particularly relating to using hydroxylated metal oxides or hydroxylated metalloid oxides as a storage medium for storing diborane.
Claims20
A composition for gas storage, comprising hydroxylated metalloid oxide, and a gas reversibly adsorbed at surfaces of the hydroxylated metalloid oxide.
A composition for gas storage, comprising hydroxylated silica, wherein the hydroxylated silica includes surface silicon atoms and isolated hydroxyl groups attached to the surface silicon atoms.
A method of storing a gas onto hydroxylated surfaces, comprising:
- reducing geminal hydroxyl groups from the hydroxylated surfaces while maintaining isolated hydroxyl groups;
- exposing the hydroxylated surfaces to the gas, such that the gas is absorbed on the hydroxylated surfaces by isolated hydroxyl groups in molecular form;
- and
- releasing the absorbed gas.
Dependencies are inferred from the claim text.