Electrostatic chuck and substrate fixing device
AssigneeShinko Electric Industries Co., Ltd.
InventorsTakashi Onuma, Keiichi Takemoto
Life of this patent
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Abstract
An electrostatic chuck includes a base body having a placement surface on which a suction target object is placed, and an electrode embedded in the base body. The base body is provided with a groove that opens to the placement surface-side and does not reach the electrode. Aloes-resistance region made of ceramics and a high-resistance region made of ceramics having a volume resistivity higher than the low-resistance region are sequentially arranged from a side close to the groove between a bottom surface of the groove and the electrode, in a thickness direction of the base body.
Claims10
An electrostatic chuck comprising:
- a base body having a placement surface on which a suction target object is placed;
- and
- an electrode embedded in the base body,
- wherein the base body is provided with a groove that opens to the placement surface-side and does not reach the electrode, and
- wherein a low-resistance region made of ceramics and a high-resistance region made of ceramics having a volume resistivity higher than the low-resistance region are sequentially arranged from a side close to the groove between a bottom surface of the groove and the electrode, in a thickness direction of the base body.
Dependencies are inferred from the claim text.