Frequency reconfigurable phased array system and material processing method performed thereby

A frequency reconfigurable phased array system, adapted to a material to be processed, including:

• a signal source, configured to output an power signal with an adjustable frequency;
• a plurality of radio frequency (RF) modules, which are signal-transmittably connected to the signal source to receive the power signal;
• a control module, which is signal-transmittably connected to the signal source and the RF modules, wherein the control module generates a plurality of mode excitation parameter sets according to an electromagnetic field distribution uniformity and generates a plurality of material processing event sets according to an energy distribution uniformity;
• a first database, which is signal-transmittably connected to the control module and stores the mode excitation parameter sets;
• and
• a second database, which is signal-transmittably connected to the control module and stores the material processing event sets;
• wherein the control module further generates a material processing schedule based on a material recipe, an average power, and a total time those are corresponding to the material to be processed;
• wherein the control module controls an operating frequency of the signal source and a RF phase and a RF operating power of each of the RF modules according to the material processing schedule, and
• the mode excitation parameter sets control the signal source to feed the power signal corresponding to the operating frequency of the signal source to the RF modules, to have the RF modules controlling the power signal to radiate an energy to a cavity.