Back to results
US 2022/0190318 A1Published application
Electrode structure and manufacturing method thereof
AssigneeIndustry-University Cooperation Foundation Hanyang University Erica Campus
InventorsTae Joo Park, Dae Woong Kim, Kyu Moon Kwon
Life of this patent
Estimating the term…
Abstract
A method for manufacturing an electrode structure is provided. The method for manufacturing an electrode structure comprises the steps of: preparing a base substrate; forming an amorphous seed layer covering the base substrate; crystallizing the seed layer; and covering the crystallized seed layer and forming a functional film for a secondary battery inherently having a crystalline structure.
Claims20
1:
- A method of manufacturing an electrode structure, the method comprising:
- preparing a base substrate;
- forming an amorphous seed layer covering the base substrate;
- crystallizing the seed layer;
- and
- forming a functional film for a secondary battery, which covers the crystallized seed layer and inherently has a crystalline structure.
3 more elements
2:
- The method of claim 1, wherein, after the preparing of the base substrate and before the forming of the amorphous seed layer, the method further comprises providing a reducing metal precursor on the base substrate to remove a native oxide film formed on the base substrate.
3:
- The method of claim 2, wherein the reducing metal remains on a surface of the base substrate from which the native oxide film is removed.
4:
- The method of claim 1, wherein, after the crystallizing of the seed layer and before the forming of the functional film for the secondary battery, the method further comprises providing a reducing metal precursor on the crystallized seed layer to remove a native oxide film formed on the crystallized seed layer.
5:
- The method of claim 4, wherein the reducing metal precursor remains on a surface of the seed layer from which the native oxide film is removed.
6:
- The method of claim 2, wherein the reducing metal precursor includes trimethylaluminium (TMA).
7:
- The method of claim 1, wherein
- the crystallizing of the seed layer includes:
- covering the seed layer with a barrier sheet, and
- annealing the seed layer covered with the barrier sheet, and
- the barrier sheet is configured to reduce a leakage of a metal inside the seed layer to an outside of the seed layer while performing the annealing.
2 more elements
8:
- The method of claim 1, wherein
- the forming of the seed layer is performed in a chamber, and the crystallizing of the seed layer is performed in a furnace,
- a native by-product layer is formed on the seed layer in a process of transferring the seed layer from the chamber to the furnace, and
- the native by-product layer is removed as the seed layer is annealed.
1 more element
9:
- The method of claim 8, wherein the native by-product layer includes a compound of a metal, carbon, and oxygen.
10:
- The method of claim 1, wherein the forming of the seed layer includes:
- providing a first precursor including a first metal on the base substrate, and providing a first reaction source on the base substrate on which the first precursor is provided to form a first seed layer obtained by allowing the first precursor and the first reaction source to react with each other;
- and
- providing a second precursor including a second metal on the first seed layer, and providing a second reaction source on the first seed layer on which the second precursor is provided to form a second seed layer obtained by allowing the second precursor and the second reaction source to react with each other.
1 more element
11:
- The method of claim 10, wherein each of the first metal and the second metal includes one of lithium (Li), cobalt (Co), lanthanum (La), zirconium (Zr), or titanium (Ti).
12:
- An electrode structure comprising:
- a base substrate;
- and
- a material film for a secondary battery, which covers a surface of the base substrate,
- wherein a reducing metal is provided between the surface of the base substrate and the material film or provided within the material film, and
- wherein the reducing metal has a higher oxygen affinity than a metal included in the material film.
3 more elements
13:
- The electrode structure of claim 12, wherein
- the material film includes a first region and a second region, which have mutually different degrees of crystallinity, and
- the first region is disposed between the second region and the base substrate.
14:
- The electrode structure of claim 13, wherein the degree of crystallinity of the first region is higher than the degree of crystallinity of the second region.
15:
- The electrode structure of claim 12, wherein the reducing metal includes aluminum (Al).
16:
- The electrode structure of claim 12, wherein the material film for the secondary battery includes one of a positive electrode, a negative electrode, or a solid electrolyte for a secondary battery.
17:
- An electrode structure comprising:
- a base substrate;
- a seed layer covering a surface of the base substrate and having a crystalline structure;
- and
- a functional film for a secondary battery, which covers the seed layer and has a crystalline structure,
- wherein an interface is provided between the seed layer and the functional film.
3 more elements
18:
- The electrode structure of claim 17, wherein the interface between the seed layer and the functional film is observed through a scanning electron microscopy (SEM) or transmission electron microscopy (TEM) image.
19:
- The electrode structure of claim 17, wherein the base substrate includes a porous structure.
20:
- The method of claim 3, wherein the reducing metal precursor includes trimethylaluminium (TMA).