Web edge metrology
AssigneeApplied Materials, Inc.
InventorsDavid Masayuki ISHIKAWA, Girish Kumar GOPALAKRISHNAN NAIR, Ezhiylmurugan RANGASAMY, David ALVAREZ, Kent Qiujing ZHAO
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AssigneeApplied Materials, Inc.
InventorsDavid Masayuki ISHIKAWA, Girish Kumar GOPALAKRISHNAN NAIR, Ezhiylmurugan RANGASAMY, David ALVAREZ, Kent Qiujing ZHAO
Estimating the term…
Metrology systems and processing methods for continuous lithium ion battery (LIB) anode pre-lithiation and solid metal anode protection are provided. In some embodiments, the metrology system integrates at least one complementary non-contact sensor to measure at least one of surface composition, coating thickness, and nanoscale roughness. The metrology system and processing methods can be used to address anode edge quality. The metrology system and methods can facilitate high quality and high yield closed loop anode pre-lithiation and anode protection layer deposition, alloy-type anode pre-lithiation stage control improves LIB coulombic efficiency, and anode coating with pinhole free and electrochemically active protection layers resist dendrite formation.
A flexible substrate coating system, comprising:
A method, comprising:
A method, comprising:
Dependencies are inferred from the claim text.