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US 2022/0190305 A1Published application
Evaporation system and evaporation method
AssigneeWuhan China Star Optoelectronics Semiconductor Display Technology Co., Ltd.
InventorKunsong Ma
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Abstract
An evaporation system and an evaporation method are provided. The present disclosure can accelerate production cycle, reduce production cost, and improve product quality by disposing an evaporation source vertically in a vacuum chamber and arranging a plurality of substrates on both sides of the evaporation source to perform evaporation on the substrates on the both sides.
Claims18
An evaporation system, comprising:
- a handling device configured to carry and transport a plurality of substrates to be deposited;
- and
- a first vacuum chamber configured to receive the substrates and perform evaporation on the substrates vertically;
- wherein the first vacuum chamber comprises:
- a first inlet, wherein the handling device horizontally transports the substrates to the first inlet;
- a flipping device configured to reverse the substrates from a horizontal state to a vertical state;
- an evaporation source disposed vertically in a middle of the first vacuum chamber, wherein the substrates after being flipped are arranged in parallel to the evaporation source and disposed on both sides of the evaporation source;
- and
- a first outlet, wherein the substrates after being deposited are transported out of the first outlet;
- wherein the both sides of the evaporation source are provided with jet outlets, and a center of the jet outlets is consistent with a center of the substrates to simultaneously perform evaporation on the substrates positioned on the both sides of the evaporation source.
7 more elements
An evaporation method, comprising:
- providing an evaporation system, wherein the evaporation system comprises:
- a handling device configured to carry and transport a plurality of substrates to be deposited;
- and a first vacuum chamber configured to receive the substrates and perform evaporation on the substrates vertically;
- wherein the first vacuum chamber comprises:
- a first inlet, wherein the handling device horizontally transports the substrates to the first inlet;
- a flipping device configured to reverse the substrates from a horizontal state to a vertical state;
- an evaporation source disposed vertically in a middle of the first vacuum chamber, wherein the substrates after being flipped are arranged in parallel to the evaporation source and disposed on both sides of the evaporation source;
- and a first outlet, wherein the substrates after being deposited are transported out of the first outlet;
- wherein the both sides of the evaporation source are provided with jet outlets, and a center of the jet outlets is consistent with a center of the substrates to simultaneously perform evaporation on the substrates positioned on the both sides of the evaporation source;
- aligning the substrates to be deposited with a first mask and attaching the substrates to a carrier;
- transporting the substrates to a plurality of sub vacuum chambers of the first vacuum chamber, wherein the substrates are disposed horizontally on the both sides of the evaporation source;
- and
- moving the evaporation source in the sub vacuum chambers and performing evaporation on the substrates.
10 more elements
Dependencies are inferred from the claim text.