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US 2022/0190245 A1Published application
Organic vapor jet printing system
AssigneeUniversal Display Corporation
InventorsKent Khuong NGUYEN, Sriram KRISHNASWAMI, Daniel TOET, Jeff HAWTHORNE, William E. QUINN
Life of this patent
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Abstract
Systems and methods for depositing materials on a substrate via OVJP are provided. A float table and grippers are used to move and position the substrate relative to one or more OVJP print bars to reduce the chance of damaging or compromising the substrate or prior depositions.
Claims29
An organic vapor jet printing (OVJP) deposition system comprising:
- one or more OVJP print bars, each comprising one or more OVJP print heads;
- a float table comprising:
- one or more substrate grippers configured to hold a substrate having a first active surface, and to adjust a position of the substrate on the float table in at least two degrees of motion;
- and
- one or more controls arranged to provide control over the one or more substrate grippers;
- and
- one or more sensors configured to measure an alignment of a substrate on the float table with the one or more OVJP print bars;
- wherein the float table is movable in a region that extends below the one or more OVJP print bars;
- and
- wherein the substrate is movable on the float table independently of movement of the float table below the one or more OVJP print bars.
7 more elements
3-5. (canceled)
13-14. (canceled)
(canceled)
21-22. (canceled)
25-27. (canceled)
29-30. (canceled)
A method of operating an OVJP deposition system, the method comprising:
- obtaining a substrate;
- placing the substrate on a float table and securing the position of the substrate using one or more grippers;
- adjusting the position of the substrate on the float table via the one or more grippers;
- moving the float table and the substrate through a region of the OVJP deposition system in which the substrate is disposed below a print bar of the OVJP deposition system while ejecting material to be deposited on the substrate from the print bar;
- and
- moving the float table to a position in the OVJP deposition system at which the substrate is not below a print bar of the OVJP deposition system.
3 more elements
34-35. (canceled)
37-45. (canceled)
Dependencies are inferred from the claim text.