A method for manufacturing an optoelectronic semiconductor device, comprising:
- forming a semiconductor layer stack comprising a first semiconductor layer of a first conductivity type and a second semiconductor layer of a second conductivity type;
- roughening a first main surface of the first semiconductor layer;
- forming a dielectric layer over the first main surface;
- planarizing a surface of the dielectric layer;
- and
- forming a transparent conductive layer over the dielectric layer, such that the transparent conductive layer covers the surface of the dielectric layer.