Semiconductor memory device and manufacturing method of the semiconductor memory device

A semiconductor memory device comprising:

• a peripheral circuit structure with a page buffer group;
• a first source pattern disposed on the peripheral circuit structure, the first source pattern with a source contact region and a page buffer connection region;
• a first opening penetrating the first source pattern in the page buffer connection region;
• a peripheral-circuit-side first pad pattern disposed in the first opening, the peripheral-circuit-side first pad pattern being connected to the page buffer group;
• a second source pattern overlapping with the first source pattern in the source contact region;
• a memory cell array disposed on the second source pattern;
• a first bit line disposed on the memory cell array, the first bit line extending to overlap with the peripheral-circuit-side first pad pattern;
• and
• a first contact structure extending toward the first bit line from the peripheral-circuit-side first pad pattern.

A method of manufacturing a semiconductor memory device, the method comprising:

• forming a peripheral circuit structure with a page buffer group and an interconnection that is connected to the page buffer group;
• forming a metal pattern group on the peripheral circuit structure, the metal pattern group with a first source pattern and a peripheral-circuit-side pad pattern;
• forming, on a substrate, a preliminary memory structure, a second source pattern that is connected to the preliminary memory structure, and a cell-array-side pad pattern that is connected to the second source pattern;
• bonding the cell-array-side pad pattern to the first source pattern;
• removing the substrate;
• forming a contact structure that is connected to the peripheral-circuit-side pad pattern;
• and
• forming a bit line that overlaps with the peripheral circuit structure with the second source pattern interposed between the bit line and the peripheral circuit structure, the bit line being connected to the contact structure.