Semiconductor Device Packages, Packaging Methods, and Packaged Semiconductor Devices
AssigneeTaiwan Semiconductor Manufacturing Company, Ltd.
InventorsJie Chen, Ying-Ju Chen, Hsien-Wei Chen
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Abstract
Semiconductor device packages, packaging methods, and packaged semiconductor devices are disclosed. In some embodiments, a package for a semiconductor device includes an integrated circuit die mounting region and a molding material disposed around the integrated circuit die mounting region. An interconnect structure is disposed over the molding material and the integrated circuit die mounting region. A protection pattern is disposed in a perimeter region of the package. The protection pattern includes a conductive feature.
Claims20
A method of manufacturing a semiconductor device, the method comprising:
- forming a protection pattern and conductive redistribution elements located in multiple metallization layers over an encapsulant, the protection pattern being located within a dielectric material isolating the protection pattern, the dielectric material extending from over the encapsulant to over a semiconductor die;
- placing external connections in connection with the conductive redistribution elements, the conductive redistribution elements electrically connecting the semiconductor die to the external connections on a first side of the dielectric material, the external connections being the only external connections on the first side of the dielectric material, and wherein the protection pattern is electrically isolated from the external connections;
- and
- bonding a packaged semiconductor device to the external connections, the packaged semiconductor device comprising first pads on a first side of the packaged semiconductor device, the first pads being the only pads on the first side of the packaged semiconductor device, each of the first pads being connected to respective ones of a plurality of solder balls, the plurality of solder balls electrically connecting the packaged semiconductor device to the conductive redistribution elements.
A method of manufacturing a semiconductor device, the method comprising:
- encapsulating a first semiconductor device with an encapsulant;
- forming a conductive redistribution layer extending over both a first semiconductor device and an encapsulant adjacent to the first semiconductor device;
- forming a protection pattern located over the encapsulant, the protection pattern comprising a second conductive material that is electrically isolated from all elements below a surface of the encapsulant, the surface of the encapsulant facing the protection pattern, the protection pattern comprising a first conductive feature and a second conductive feature, the second conductive feature being separated from the first conductive feature by a dielectric material in a direction extending away from the encapsulant, wherein the dielectric material electrically isolates the protection pattern;
- electrically connecting a device to the first semiconductor device through a first external connection and the conductive redistribution layer;
- and
- electrically connecting a printed circuit board to the first semiconductor device through a second external connection, the second external connection being on an opposite side of the first semiconductor device than the first external connection.
A method of manufacturing a semiconductor device, the method comprising:
- encapsulating a semiconductor die within an encapsulant;
- depositing a plurality of first conductive layers over both the semiconductor die and the encapsulant;
- depositing a plurality of second conductive layers overlying the encapsulant, wherein individual ones of the plurality of second conductive layers are aligned with respective ones of the plurality of first conductive layers, wherein at least one of the plurality of second conductive layers is located in a different metallization layer from a second one of the plurality of second conductive layers, wherein a dielectric material completely electrically isolates the plurality of second conductive layers from the plurality of first conductive layers and from the encapsulant;
- placing external connectors in electrical connection with the plurality of first conductive layers, wherein the dielectric material completely electrically isolates the plurality of second conductive layers from each one of the external connectors that are located on an opposite side of the dielectric material from the semiconductor die;
- bonding a substrate to the external connectors, wherein each pad located on a side of the substrate facing the semiconductor die is connected to a respective one of the external connectors, wherein after the bonding a first memory chip is connected to the external connectors through the substrate and a second memory chip is connected to the external connectors through the substrate;
- and
- connecting a printed circuit board to the semiconductor die, the printed circuit board being located on an opposite side of the semiconductor die from the substrate.
Dependencies are inferred from the claim text.