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US 2022/0189863 A1Published application
Redistribution layer structure
AssigneeInnolux Corporation
InventorsHung-Sheng Chou, Wen-Hsiang Liao, Kuo-Jung Fan, Heng-Shen Yeh, Cheng-Chi Wang
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Abstract
A redistribution layer structure is provided. The redistribution layer structure includes a first metal layer, a first dielectric layer disposed on the first metal layer, a second metal layer disposed on the first dielectric layer, and a second dielectric layer disposed on the second metal layer. A coefficient of thermal expansion of the first dielectric layer is less than a coefficient of thermal expansion of the second dielectric layer.
Claims20
A redistribution layer structure, comprising:
- a first metal layer;
- a first dielectric layer disposed on the first metal layer;
- a second metal layer disposed on the first dielectric layer;
- and
- a second dielectric layer disposed on the second metal layer,
- wherein, a coefficient of thermal expansion of the first dielectric layer is less than a coefficient of thermal expansion of the second dielectric layer.
3 more elements
A redistribution layer structure, comprising:
- a first redistribution layer, the first redistribution layer comprising:
- a first metal layer;
- and
- a first dielectric layer disposed on the first metal layer;
- and
- a second redistribution layer disposed on the first redistribution layer, and the second redistribution layer comprising:
- a second metal layer disposed on the first dielectric layer;
- and
- a second dielectric layer disposed on the second metal layer,
- wherein a thickness of the first dielectric layer is greater than a thickness of the second dielectric layer.
7 more elements
A package structure, comprising:
- a redistribution layer structure, comprising:
- a first metal layer;
- a first dielectric layer disposed on the first metal layer;
- a second metal layer disposed on the first dielectric layer;
- and
- a second dielectric layer disposed on the second metal layer, wherein a thickness of the first dielectric layer is greater than a thickness of the second dielectric layer;
- and
- a substrate.
5 more elements
Dependencies are inferred from the claim text.